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Abstract

Optical emission spectroscopy (OES) can be used to map the electron energy distribution of hydrogen plasmas. Using actinometry, a type of OES where trace amounts of noble gases are introduced, the effect of discharge power on the electron temperature of hydrogen plasmas was explored. This was done using argon and krypton as actinometers for low pressure hydrogen plasmas. It was determined that the electron temperature decreased with respect to power supplied to the discharge.

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